电容多通道系统可实现最高分辨率
电容位移传感器设计用于要求极高精度的测量任务。capaNCDT 6500 电容多通道系统非常适合亚纳米分辨率的可靠测量。控制器的最大响应速率为 7.8kHz(数字,最多四个通道)或 8.5kHz 频率响应。除了模拟输出,还提供EtherCAT接口。EtherCAT能够实现实时准确的数据传输,高速集成到现有的测量环境中,并实现两个系统的同步。使用网络浏览器可以轻松完成capaNCDT 6500系统的设定和配置。
最大分辨率
capaNCDT 6500系统专为要求亚纳米分辨率的测量任务而设计。它的优势在半导体工业和实验室应用的定位任务中表现得尤为突出。模块化capaNCDT 6500专为多通道应用而设计。最多可通过一个前置放大器将八个传感器连接到信号调节电子装置上。

DT6530电容控制器为电容式位移测量提供了最大的分辨率和信号稳定性。该控制器可操作多达8个通道,不仅适用于导电物体,也适用于绝缘体。除了模拟输出,控制器还配备了以太网数字接口。DT6530控制器与capaNCDT系列的所有传感器和电缆兼容。
- 动态分辨率0.002%FSO(8.5 kHz)
- 频率响应8.5 kHz(-3 dB)(可切换20Hz;1kHz;8.5 kHz)
- 模拟输出0...10V(防短路),4...20m;0...20mA
- 数字接口以太网24位;EtherCAT
- 特殊调谐:高达标准电缆长度的四倍
- Data sheet capaNCDT 6500 (pdf, 1.20 MB)
- Operating Instructions capaNCDT 6500 EtherCAT (pdf, 7.94 MB)
- CAD file 3D-model DT6530/C rack, STEP (zip, 5.20 MB)
- sensorTOOL V2.1.1 (exe, 17.85 MB)
- Firmware update DT6530: SW1.5a / FW1.3a / Web-Build 20689 (zip, 1.26 MB)
- Micro-Epsilon EtherCAT ESI file "IF1032" (zip, 38.19 KB)
- MEDAQLib V5.3.1 (zip, 22.86 MB)

The mounting frame is designed for use with capacitive sensors for two-sided thickness measurements and helps to align the measuring points with one another. The frame allows for the sensors to lie exactly on one axis, meaning that the measuring points are arranged congruently. This prevents measurements at an offset and a reliable measurement result is achieved with the highest possible precision. The mounting frames provide space for up to 6 sensors. Two sensors each form a measuring point.
- Multi-track thickness measurement at up to 3 points simultaneously
- High temperature stability for precise measurements at temperatures of up to 100 °C
- Suitable for vacuum
- Extremely compact design
- Easy integration and retrofitting in existing systems
- Compatible with capaNCDT sensors
- Calibratable design for high precision in thickness measurements