硅锭外型检测-2D/3D
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发布日期:2014-05-12 浏览: 次
本案例用于测量多晶硅锭的众多属性,如边长,角度或者对角线长度。硅锭的表面光洁度也可以得到测量。采用激光轮廓扫描仪的好处很多,如非接触,免磨损以及对被测物体无机械影响。相对于人工检测,该系统稳定性非常高。
The optical dimensionCONTROL 8260 for Ingots inspection system for silicon ingots automatically measures the surface of the ingot and automatically performs, among other things, a measurement of the side lengths, phase lengths, angles and diagonal lengths. The flatness of the side surfaces is also measured.The automated optical inspection opens up numerous benefits. It is non-contacting, wear-free and does not exert any kind of mechanical influences on the target and, in contrast to manual inspection, repeatability is very high。
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